Silicon khabhayithi Cantilevers Paddle
Product eneenkcukacha kunye nesicelo
I-wafer enkulu yokulayisha amandla e-silicon carbide SiSiC / SiC cantilever paddle / beam ilungele ukulayishwa ngokuzenzekelayo kunye nenkqubo yokuphatha kuba inentsebenzo ezinzileyo, engekho deformation kubushushu obuphezulu kunye nomkhosi omkhulu wokulayisha. Kuba icandelo le-cantilever paddle lizinzile kungekho deformation, kunokwenzeka ukuba wenze ubungakanani obukhulu bokubambisa usebenzisa iityhubhu zomlilo ezikhoyo. I-wafer enkulu yokulayisha amandla e-silicon carbide SiSiC / SiC cantilever paddle / beam inokusetyenziswa kwi-LPVCD ngesiseko sayo esifanayo sokwanda komlingani we-LPVCD, eyandisa kakhulu umjikelo wokugcina nokucoca, kwaye kunciphisa kakhulu ukungcola.
Iiparamitha zobuchwephesha zokuphendula kwi-silicon carbide RBSIC:
| into | iyunithi | idatha |
| Ubushushu besicelo | ℃ | 1380 |
| mninzi | G / cm3 | > = 3.02 |
| Vula porosity | % | <0.1 |
| Isikali sikaMoh sobunzima | 13 | |
| Ukugoba amandla | MPHA | 250 (20 ℃) |
| MPHA | 280 (1200 ℃) | |
| Imodyuli yokuqina | IGPA | 330 (20 ℃) |
| IGPA | 300 (1200 ℃) | |
| Ukuqhutywa kobushushu | W / mk | I-45 (1200 ℃) |
| Umlingani wolwandiso lwe-thermal | I-K-1 * 10-6 | 4.5 |
| Ubungqina be-alkaline | Egqwesileyo |
Iimbonakalo:
a. Ayikhubazi kubushushu obuphezulu kwaye amandla okulayisha angamakhulu makhulu;
b. Ukuxhathisa ukothuka ngokugqwesileyo kobushushu kunye nobomi benkonzo ende;
c. I-coefficient yokwanda kwe-thermal ye-cantilever paddle incinci kakhulu, eyandisa kakhulu umjikelo wokugcina nokucoca;
kwaye ukunciphisa kakhulu ukungcola
Enye ifanitshala yeoyile eyenziwe yisilicon khabhayithi yodongwe
Ngaphandle kwempendulo yentsimbi yesilicon carbide SiSiC cantilever paddle for wafer loading, sikwavelisa enye ifanitshala yeoyile kubandakanya iRBSIC / SISIC i-silicon carbide beams, imibhobho yemilomo, ityhubhu yombhobho womoya, ityhubhu yomlomo ojikelezayo, ityhubhu ye-SIC yesilicon khabhayithi / ipleyiti yesitayile kunye nemibhobho yokupholisa yeRBSIC .
Nxiba iimveliso ze-silicon carbide enganyangekiyo kwi-RBSIC / SISIC
Ngenxa yokuba imveliso ye-silicon carbide yethu i-RBSIC / SISIC inezibonelelo zokuxhathisa kakhulu ukunxiba, ukumelana nokubola kunye nobomi benkonzo ende, inokwenziwa ukuba ibe ngamanqwanqwa anokuthamba anokufakwa ngokulula kwimibhobho yokulungisa okanye iinkanyamba.
